Ming-Feng Wu

Title: The Innovations of Ming-Feng Wu

Introduction

Ming-Feng Wu is a notable inventor based in San Jose, CA. He has made significant contributions to the field of plasma technology, holding 2 patents that showcase his innovative approach to electron beam plasma sources.

Latest Patents

His latest patents include an "Electron beam plasma source with remote radical source," which utilizes an electron beam as the plasma source in a plasma reactor for processing a workpiece. This invention incorporates a remote radical source within the process chamber to enhance efficiency. Another significant patent is the "Plasma reactor with electron beam plasma source having a uniform magnetic field." This invention features electron beam-confining electromagnets aligned with the electron beam axis, designed to optimize the performance of the electron beam generator.

Career Highlights

Ming-Feng Wu is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work focuses on advancing plasma technology, which is crucial for various manufacturing processes.

Collaborations

He has collaborated with esteemed colleagues such as Leonid Dorf and Shahid Rauf, contributing to a dynamic research environment that fosters innovation.

Conclusion

Ming-Feng Wu's contributions to plasma technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in semiconductor manufacturing and related technologies.