Applied Materials, Inc.

Ming-Feng Wu

Kenneth S Collins

Shahid Rauf

Leonid Dorf

Kartik Ramaswamy

Ying Di Zhang

Ajit Balakrishna

Hamid Tavassoli

Steven Lane

Nipun Misra

In a plasma reactor for processing a workpiece, an electron beam is employed as the plasma source, and a remote radical source is incorporated with the process chamber.

Electron beam plasma source with remote radical source

Electron beam-confining electromagnets of an electron beam generator are aligned with an electron beam axis, each of the electromagnets being folded to define a main section and a pair of angled wing sections disposed at respective angles relative to said main section, and a conductor wound around the edge.

Plasma reactor with electron beam plasma source having a uniform magnetic field

Growing community of inventors

San Jose, CA, United States of America

Ming-Feng Wu