Ming-Feng Chen

Title: The Innovative Contributions of Ming-Feng Chen

Introduction

Ming-Feng Chen is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor processing through his innovative inventions. With a total of 3 patents to his name, Chen continues to push the boundaries of technology.

Latest Patents

One of Chen's latest patents is focused on systems and methods for robotic arm sensing. In this embodiment, a robotic arm includes a base, at least one link secured to the base, and a gripper secured to the link. The gripper is designed to secure a wafer while the link is in motion and to release the wafer when the link is stopped. A sensor is disposed on the finger of the gripper, which collects data characterizing the robotic arm's interaction with a semiconductor processing chamber while the wafer is secured. Another significant patent is for a gas injector used in semiconductor processing systems. This invention comprises a tube and at least one nozzle head mounted on the downstream end of the tube. The nozzle allows fluid communication to discharge gas from the upstream end to the ambient atmosphere, while also incorporating flow regulation components to reduce film buildup on the inner surfaces of the gas injector.

Career Highlights

Ming-Feng Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he applies his expertise in semiconductor technology. His work has been instrumental in advancing the capabilities of robotic systems in semiconductor processing.

Collaborations

Chen has collaborated with notable coworkers, including Yan-Hong Liu and Che-Fu Chen, contributing to various projects that enhance semiconductor manufacturing processes.

Conclusion

Ming-Feng Chen's innovative patents and contributions to the semiconductor industry highlight his role as a leading inventor. His work continues to influence advancements in technology and robotics.