Kyungki-do, South Korea

Min-sub Kang


Average Co-Inventor Count = 5.0

ph-index = 1

Forward Citations = 45(Granted Patents)


Company Filing History:


Years Active: 2002

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1 patent (USPTO):Explore Patents

Title: The Innovative Work of Min-sub Kang in Semiconductor Technology

Introduction: Min-sub Kang is a notable inventor based in Kyungki-do, South Korea, with a significant contribution to the field of semiconductor technology. His inventive prowess is showcased through a patented method aimed at enhancing the efficiency of semiconductor wafer measurement, a crucial aspect of semiconductor manufacturing.

Latest Patents: Kang's sole patent is titled "Method of measuring etched state of semiconductor wafer using optical impedance measurement." This innovative process involves radiating light at a semiconductor wafer that has undergone etching. By measuring the reflected light within a selected wavelength band, Kang's method determines whether the wafer is under-etched by calculating the ratio of the output value to a reference value obtained from a bare silicon surface. Furthermore, his invention extends to determining the thickness of remaining oxide or damaged layers based on specific etch recipes, effectively addressing challenges in semiconductor fabrication.

Career Highlights: Min-sub Kang is associated with Samsung Electronics Co., Ltd., a leading global technology company that excels in innovation and research. His work focuses on optimizing manufacturing processes by implementing advanced measurement techniques, thereby contributing to the enhanced performance and reliability of semiconductor devices.

Collaborations: Throughout his career, Kang has collaborated with talented colleagues such as Hyung-suk Cho and Sang-mun Chon. These partnerships signify a collective effort in the realm of semiconductor research, fostering an environment of innovation and excellence within their organization.

Conclusion: Min-sub Kang stands out as a significant figure in the semiconductor industry, with his innovative approaches to wafer measurement serving as valuable contributions to the field. Through his patent and collaborative efforts at Samsung Electronics Co., Ltd., Kang exemplifies the spirit of innovation that drives advancements in technology and keeps the industry moving forward.

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