This inventor holds 1 USPTO granted patent and 4 published patent applications. Top assignee: Wonik Qnc Corporation. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Min Seob Jung: Semiconductor Equipment Cleaning Innovation.
Introduction
Min Seob Jung is an inventor based in Seoul, South Korea, and is associated with Wonik QnC Corporation. His patent work addresses the maintenance of semiconductor fabrication equipment, particularly the removal of contaminants from aluminum nitride (AlN) heaters.
Latest Patents
Jung is named on 1 patent: “Method and Apparatus for Dry-Cleaning AlN Heater for Semiconductor Fabrication Equipment.” The invention describes a laser-based method for removing fluorine-containing contaminants from AlN heaters. It involves selecting a laser, determining the control factors needed for cleaning with that laser, and irradiating the heater according to those factors. The approach is designed to remove organic, inorganic metallic, and other inorganic contaminants efficiently and simultaneously.
Career Highlights
Jung’s patent reflects a focus on practical equipment-cleaning methods for semiconductor manufacturing. By using laser irradiation to clean AlN heaters, the disclosed method aims to address contamination generated during fabrication processes.
Collaborations
Jung’s listed coworkers include Eun Young Choi and Sang Hyun Cho. The patent information provided does not specify their individual contributions.
Conclusion
Min Seob Jung’s patent work at Wonik QnC Corporation centers on laser-based dry cleaning for semiconductor equipment, with the goal of removing multiple types of contaminants from AlN heaters.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile