Mikio Goto

Title: Mikio Goto: Innovator in Supply Systems

Introduction

Mikio Goto is a notable inventor based in Minato, Japan. He has made significant contributions to the field of supply systems, particularly in the area of low volatility precursors. His innovative approach has led to the development of a unique supply system that enhances efficiency and safety in various applications.

Latest Patents

Mikio Goto holds a patent for a "Supply system for low volatility precursors." This system includes a first vessel containing the precursor, a second vessel, and a first gas conduit fluidically connecting the two vessels. It features a pressure reduction device and a flow control device, along with a second gas conduit that connects the second vessel to a point of use. A pressure gauge is also included to measure the partial pressure of the precursor in the second vessel. The design ensures that the partial pressure is lower than the saturated vapor pressure of the precursor at the temperature of the second vessel, while still meeting the inlet pressure requirements of the flow control device.

Career Highlights

Mikio Goto is currently employed at L'air Liquide, Société Anonyme Pour L'étude Et L'exploitation Des Procédés Georges Claude. His work at this esteemed company has allowed him to further develop his expertise in supply systems and contribute to advancements in the field.

Collaborations

Mikio has collaborated with several talented individuals, including Toshiyuki Nakagawa and Shingo Okubo. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

Mikio Goto's contributions to the field of supply systems demonstrate his commitment to innovation and excellence. His patent for a supply system for low volatility precursors showcases his ability to address complex challenges in the industry. Through his work and collaborations, he continues to make a significant impact in his field.