This inventor holds 1 USPTO granted patent. Top assignee: Kla Instruments Corporation. Active years: 1996.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1996
Title: The Innovative Mind of Mike Robinson
Introduction
Mike Robinson is a notable inventor based in San Jose, California. He has made significant contributions to the field of particle scanning systems, particularly through his innovative patent. His work exemplifies the intersection of technology and engineering, showcasing his dedication to advancing inspection systems.
Latest Patents
Mike Robinson holds a patent for an "Electron beam inspection system and method." This invention encompasses various embodiments of a method and apparatus designed for a particle scanning system and an automatic inspection system. The system directs a particle beam at the surface of a substrate for scanning purposes. It includes a selection of detectors to identify secondary particles, back-scattered particles, and transmitted particles from the substrate. The substrate is mounted on an x-y stage, allowing for at least one degree of freedom during scanning. Additionally, the substrate is subjected to an electric field to accelerate secondary particles, enhancing the system's efficiency. The invention also features optical alignment means for initial substrate alignment and a vacuum system for effective substrate handling.
Career Highlights
Mike Robinson is currently employed at Kla Instruments Corporation, where he continues to innovate and develop advanced technologies. His work at the company has positioned him as a key player in the field of inspection systems. His patent reflects his expertise and commitment to improving particle scanning technology.
Collaborations
Mike has collaborated with talented individuals such as Dan Meisburger and Alan D Brodie. These partnerships have contributed to the development of cutting-edge technologies in the industry.
Conclusion
Mike Robinson's contributions to the field of particle scanning systems through his innovative patent demonstrate his expertise and commitment to technological advancement. His work continues to influence the industry and inspire future innovations.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile