Mike Barnes

Title: Mike Barnes: Innovator in Dielectric Materials

Introduction

Mike Barnes is a notable inventor based in San Ramon, CA (US). He has made significant contributions to the field of dielectric materials, holding a total of 3 patents. His work focuses on improving methods for preparing low-k dielectric materials, which are essential in various electronic applications.

Latest Patents

One of his latest patents is titled "Method for porogen removal and mechanical strength enhancement of low-k carbon doped silicon oxide using low thermal budget microwave curing." This invention provides improved methods for preparing low-k dielectric materials on substrates using microwave radiation. The innovative use of microwave radiation allows for the preparation of low-k films at low temperatures. The method involves forming a precursor film containing a porogen and a structure former on a substrate, exposing it to microwave radiation to remove the porogen, and subsequently increasing the mechanical strength of the resulting porous dielectric layer.

Another significant patent by Barnes is "Hydroxyl bond removal and film densification method for oxide films using microwave post treatment." This invention outlines methods for forming dielectric films with increased density and enhanced properties. The techniques involve exposing dielectric films to microwave radiation, which can remove hydroxyl bonds, increase film density, and optimize properties such as dielectric constant and refractive index for specific applications.

Career Highlights

Throughout his career, Mike Barnes has worked with prominent companies in the semiconductor industry, including Novellus Systems Incorporated and Applied Materials, Inc. His experience in these organizations has contributed to his expertise in dielectric materials and microwave processing techniques.

Collaborations

Barnes has collaborated with notable colleagues such as Seon-Mee Cho and George D Papasouliotis. These collaborations have further enriched his research and development efforts in the field of dielectric materials.

Conclusion

Mike Barnes is a distinguished inventor whose work in dielectric materials has led to innovative patents that enhance the performance of electronic components. His contributions continue to impact the semiconductor industry positively.