Location History:
- Shunan, JP (2008 - 2014)
- Tokyo, JP (2016)
Company Filing History:
Years Active: 2008-2016
Title: Michinori Kawaguchi: Innovator in Vacuum Processing Technology
Introduction
Michinori Kawaguchi is a notable inventor based in Shunan, Japan. He has made significant contributions to the field of vacuum processing technology, holding a total of 4 patents. His work focuses on improving the efficiency and effectiveness of vacuum processing apparatuses.
Latest Patents
Kawaguchi's latest patents include an "Operation method for vacuum processing apparatus." This method outlines a systematic approach for operating a vacuum processing apparatus that features multiple cassette stands and vacuum processing vessels. The apparatus is designed to transport and process wafers in a predetermined order, enhancing operational efficiency. Another significant patent is the "Vacuum process device and vacuum process method," which presents an innovative method for controlling transportation in a linear tool type vacuum process device. This method addresses the challenges of unstable processing times by counting unprocessed wafers and determining transport destinations accordingly.
Career Highlights
Kawaguchi is currently employed at Hitachi High-Technologies Corporation, where he continues to develop advanced technologies in vacuum processing. His expertise has positioned him as a key player in the industry, contributing to the advancement of semiconductor manufacturing processes.
Collaborations
Some of his coworkers include Satomi Inoue and Keita Nogi, who collaborate with him on various projects within the company.
Conclusion
Michinori Kawaguchi's innovative work in vacuum processing technology has made a significant impact on the industry. His patents reflect a commitment to enhancing operational efficiency and addressing challenges in semiconductor manufacturing.