The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2014
Filed:
May. 24, 2012
Teruo Nakata, Yohohama, JP;
Keita Nogi, Tokyo, JP;
Satomi Inoue, Kudamatsu, JP;
Michinori Kawaguchi, Shunan, JP;
Teruo Nakata, Yohohama, JP;
Keita Nogi, Tokyo, JP;
Satomi Inoue, Kudamatsu, JP;
Michinori Kawaguchi, Shunan, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An efficient method of controlling transportation in a linear tool type vacuum process device in a state that a length of time required for a process is not stable. For each process chamber, the number of unprocessed wafers that are in process or are being transported to the process chamber is counted, and in deciding a transport destination of a wafer, when the number of unprocessed wafers is equal to or larger than a charge limit amount, a transport destination of a wafer is decided excluding the process chamber. Also, a wafer holding mechanism on a transport path to a process chamber is reserved, and a transport destination of a processed member to be transported next is decided according to a status of reservation.