Bethel, CT, United States of America

Michele Stawasz


Average Co-Inventor Count = 9.0

ph-index = 3

Forward Citations = 931(Granted Patents)


Location History:

  • Bethel, CT (US) (2006 - 2007)
  • New Milford, CT (US) (2012)

Company Filing History:


Years Active: 2006-2012

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3 patents (USPTO):

Title: Michele Stawasz: Innovator in Semiconductor Processing Technologies

Introduction

Michele Stawasz is a prominent inventor based in Bethel, CT (US). She has made significant contributions to the field of semiconductor processing, particularly in the detection of fluorine-containing species. With a total of 3 patents to her name, Michele's work is instrumental in advancing technology in this critical area.

Latest Patents

Michele's latest patents include an innovative apparatus and process for sensing fluoro species in semiconductor processing systems. This gas detector is designed to detect fluorine-containing species in gases, such as effluents from semiconductor processing tools undergoing etch cleaning with HF, NF, and other chemicals. The detector employs a microelectromechanical system (MEMS)-based device structure and features a free-standing metal element that serves as both a sensing component and a heat source when elevated temperature sensing is necessary. This unique design allows the free-standing metal element to be fabricated directly onto a standard chip carrier or device package, transforming the package into a platform for the detector.

Career Highlights

Michele Stawasz is currently employed at Advanced Technology Materials, Inc., where she continues to push the boundaries of innovation in semiconductor technology. Her expertise and dedication have made her a valuable asset to her team and the industry as a whole.

Collaborations

Michele collaborates with notable colleagues, including Frank DiMeo, Jr. and Philip S. H. Chen. Their combined efforts contribute to the advancement of technologies that enhance semiconductor processing capabilities.

Conclusion

Michele Stawasz is a trailblazer in the field of semiconductor processing, with a focus on innovative detection technologies. Her contributions through her patents and collaborations highlight her commitment to advancing the industry. Michele's work continues to inspire future innovations in semiconductor technology.

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