The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2006
Filed:
Oct. 17, 2002
Frank Dimeo, Jr., Danbury, CT (US);
Philip S. H. Chen, Bethel, CT (US);
Jeffrey W. Neuner, Bethel, CT (US);
James Welch, New Fairfield, CT (US);
Michele Stawasz, Bethel, CT (US);
Thomas H. Baum, New Fairfield, CT (US);
Mackenzie E. King, Southbury, CT (US);
Ing-shin Chen, Danbury, CT (US);
Jeffrey F. Roeder, Brookfield, CT (US);
Frank Dimeo, Jr., Danbury, CT (US);
Philip S. H. Chen, Bethel, CT (US);
Jeffrey W. Neuner, Bethel, CT (US);
James Welch, New Fairfield, CT (US);
Michele Stawasz, Bethel, CT (US);
Thomas H. Baum, New Fairfield, CT (US);
Mackenzie E. King, Southbury, CT (US);
Ing-Shin Chen, Danbury, CT (US);
Jeffrey F. Roeder, Brookfield, CT (US);
Advanced Technology Materials, Inc., Danbury, CT (US);
Abstract
A gas detector and process for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF, etc. The detector in a preferred structural arrangement employs a microelectromechanical system (MEMS)-based device structure and/or a free-standing metal element that functions as a sensing component and optionally as a heat source when elevated temperature sensing is required. The free-standing metal element can be fabricated directly onto a standard chip carrier/device package so that the package becomes a platform of the detector.