Michael Makowski

Title: Innovations of Michael Makowski in Semiconductor Technology

Introduction

Michael Makowski is an accomplished inventor based in Beaverton, Oregon. He has made significant contributions to the field of semiconductor technology, particularly in the manufacturing of integrated circuits. His innovative work focuses on enhancing the electrical isolation of transistor structures, which is crucial for the performance and reliability of electronic devices.

Latest Patents

One of Michael Makowski's notable patents is titled "Gap fill dielectrics for electrical isolation of transistor structures in the manufacture of integrated circuits." This patent describes transistor structures that comprise semiconductor features and dielectric material made of silicon and oxygen. The dielectric material fills the gaps between the features using an atomic layer deposition (ALD) process. This process includes a silicon deposition phase and an oxidation phase augmented by plasma-activated nitrogen species. The unique aspect of this invention is that the nitrogen species preferentially passivate surfaces with low aspect ratios, which can increase the energy barrier to surface reactions with silicon precursors. This results in a differential deposition rate that varies significantly based on the aspect ratio of the filled gaps.

Career Highlights

Michael Makowski is currently employed at Intel Corporation, a leading company in semiconductor manufacturing. His work at Intel has allowed him to be at the forefront of technological advancements in the industry. He has been instrumental in developing innovative solutions that enhance the efficiency and effectiveness of integrated circuit production.

Collaborations

Throughout his career, Michael has collaborated with talented individuals such as Sudipto Naskar and Ryan Pearce. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.

Conclusion

Michael Makowski's contributions to semiconductor technology exemplify the importance of innovation in the electronics industry. His patent on gap fill dielectrics showcases his expertise and commitment to advancing integrated circuit manufacturing. His work continues to influence the future of technology and electronic devices.