Saratoga, CA, United States of America

Michael Liu

USPTO Granted Patents = 5 

Average Co-Inventor Count = 6.7

ph-index = 2

Forward Citations = 8(Granted Patents)


Company Filing History:


Years Active: 2016-2021

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5 patents (USPTO):

Title: **Michael Liu: Innovator in Thermal Processing Technology**

Introduction

Michael Liu, an accomplished inventor based in Saratoga, California, has made significant contributions to the field of thermal processing technology. With a portfolio of five patents, he is recognized for his innovative solutions that enhance the efficiency and effectiveness of substrate processing.

Latest Patents

Among his latest innovations is the "Thermal Processing Chamber with Low Temperature Control." This patent describes an advanced process chamber that includes a chamber body, a window, and a shield, all designed to minimize reflective radiant energy impacting the substrate during operation. This design improves temperature uniformity, crucial for the precision required in thermal processing applications.

Additionally, Liu's "Thermal Cooling Member with Low Temperature Control" also outlines a similar approach, emphasizing the integration of a cooling member with the edge support to ensure optimal temperature management. Both patents reflect Liu's focus on enhancing rapid thermal processing (RTP) techniques for better substrate performance.

Career Highlights

Michael Liu currently works at Applied Materials, Inc., a leading company in materials engineering and semiconductor fabrication. His work at Applied Materials includes developing technologies that are pivotal for modern manufacturing processes, particularly in the semiconductor industry.

Collaborations

Liu's innovative journey has been marked by collaborations with notable colleagues such as Norman L Tam and Leonid Mark Tertitski. Together, they have leveraged their expertise to advance thermal processing technologies, pushing the boundaries of what is possible in substrate handling and processing.

Conclusion

Michael Liu stands out as a prominent inventor whose work in thermal processing has impacted the semiconductor industry. His patents demonstrate a commitment to innovation and technological advancement. As he continues to collaborate with talented professionals in the field, Liu's contributions promise to enhance efficiency and precision in substrate processing for years to come.

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