Company Filing History:
Years Active: 2018
Title: Innovations by Michael Jöst in Photolithography
Introduction
Michael Jöst is an accomplished inventor based in Gross-Gerau, Germany. He has made significant contributions to the field of photolithography, particularly through his innovative methods for determining reference points on substrates. His work is essential for enhancing the precision and efficiency of photolithographic processes.
Latest Patents
Michael Jöst holds a patent for a method and device for determining a reference point of an orientation marking on a substrate of a photolithographic mask in an automated manner. This invention involves several steps, including performing line scans to locate elements of the alignment mark and estimating the reference point based on these elements. The imaging of the target region is carried out at a higher resolution, ensuring accuracy in determining the reference point.
Career Highlights
Michael Jöst is associated with Carl Zeiss SMT GmbH, a leading company in the field of optical systems and photolithography. His work at the company has been pivotal in advancing technologies that support the semiconductor industry. With a focus on innovation, he continues to contribute to the development of cutting-edge solutions.
Collaborations
Michael Jöst has collaborated with notable colleagues, including Michael Budach and Ralf Schönberger. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and expertise, further enhancing the quality of their work.
Conclusion
Michael Jöst's contributions to photolithography through his innovative patent demonstrate his commitment to advancing technology in this critical field. His work not only reflects his expertise but also the collaborative spirit of his colleagues at Carl Zeiss SMT GmbH.