Michael Grupp

Title: Michael Grupp - Innovator in Catadioptric Projection Lens Technology

Introduction

Michael Grupp is a notable inventor based in Aalen, Germany. He has made significant contributions to the field of optical engineering, particularly in the development of advanced projection lens systems. His innovative work has led to the creation of a unique patent that enhances imaging technology.

Latest Patents

Michael Grupp holds a patent for a catadioptric projection lens and the method for producing it. This projection lens is designed to effectively image a pattern from a mask into an image field using electromagnetic radiation with an operating wavelength of less than 260 nm. The lens comprises multiple lens elements and mirrors, including at least one concave mirror. The design defines a projection beam path that extends from the object plane to the image plane, incorporating at least one pupil plane. Notably, the mirrors feature freeform surfaces that enhance the optical performance of the system.

Career Highlights

Michael Grupp is currently employed at Carl Zeiss SMT GmbH, a leading company in optical systems and solutions. His work at this prestigious organization has allowed him to push the boundaries of optical technology and contribute to advancements in the field.

Collaborations

Michael has collaborated with talented coworkers, including Martin Rocktaeschel and Hendrik Wagner. Their combined expertise has fostered an environment of innovation and creativity within their projects.

Conclusion

Michael Grupp's contributions to the field of optical engineering, particularly through his patent for a catadioptric projection lens, highlight his role as a significant innovator. His work continues to influence advancements in imaging technology.