Michael Gasvoda

Title: Michael Gasvoda: Innovator in Semiconductor Processing

Introduction

Michael Gasvoda is a notable inventor based in Los Gatos, California. He has made significant contributions to the field of semiconductor processing, particularly through his innovative patent related to wafer inspection and processing.

Latest Patents

Michael Gasvoda holds a patent for "In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning." This patent discloses methods and apparatus for inspecting and processing semiconductor wafers. The system includes an edge detection system designed to receive each wafer that is to undergo a photolithography process. The edge detection system comprises an illumination channel that directs one or more illumination beams towards the side, top, and bottom edge portions within a border region of the wafer. Additionally, the edge detection system features a collection module for gathering and sensing output radiation that is scattered or reflected from the edge portion of the wafer. An analyzer module is also included to locate defects in the edge portion and determine whether each wafer is within specification based on the sensed output radiation. The photolithography system is configured to receive each wafer found to be within specification from the edge detection system, which is coupled in-line with the photolithography system. Michael Gasvoda has 1 patent to his name.

Career Highlights

Michael Gasvoda is currently employed at KLA Corporation, a leading company in the semiconductor industry. His work focuses on enhancing the efficiency and accuracy of semiconductor manufacturing processes through innovative technologies.

Collaborations

Throughout his career, Michael has collaborated with talented professionals, including Lena Nicolaides and Ben-Ming Benjamin Tsai. These collaborations have contributed to advancements in semiconductor technology and have fostered a productive work environment.

Conclusion

Michael Gasvoda's contributions to semiconductor processing through his innovative patent demonstrate his expertise and commitment to advancing technology in this critical field. His work continues to impact the industry positively.