This inventor holds 2 USPTO granted patents. Top assignee: Euv LLC.. Active years: 2004-2005.
Company Filing History:
Years Active: 2004-2005
Title: Michael E. Malinowski: Innovator in Optical Detection Technologies
Introduction
Michael E. Malinowski is a notable inventor based in Livermore, California. He has made significant contributions to the field of optical detection technologies, holding 2 patents that showcase his innovative approach to addressing challenges in the industry.
Latest Patents
One of his latest patents is titled "Method and apparatus for detecting the presence and thickness of carbon and oxide layers on EUV reflective surfaces." This invention quantifies the characteristics of radiation reflected from carbon deposits and oxidation formations on highly reflective surfaces, such as Mo/Si mirrors. It has been demonstrated that carbon deposits on these mirrors decrease the intensity of reflected HeNe laser (632.8 nm) light, while oxide layers increase the HeNe power reflection. This technology enables both static measurements and real-time monitoring of surface impurities on optical elements used in lithography tools.
Another significant patent is the "Portable outgas detection apparatus." This portable device is designed to detect surface outgas contaminants of an article. It features a portable housing with a chamber that communicates with a port, allowing it to be sealably attached to the surface of the article. The device includes a mass spectrometer for analyzing gaseous materials and means for generating a vacuum within the chamber to draw outgas contaminants for analysis. By comparing the mass spectrometric data from a contaminated surface with that from a clean surface, the type and amount of outgas contaminants can be determined.
Career Highlights
Michael E. Malinowski works at EUV LLC, where he continues to develop innovative solutions in optical detection. His work has been instrumental in advancing technologies that enhance the performance and reliability of optical systems.
Collaborations
He collaborates with Steven Julian Haney, contributing to the development of cutting-edge technologies in their field.
Conclusion
Michael E. Malinowski's contributions to optical detection technologies through his patents reflect his commitment to innovation and excellence. His work continues to impact the industry positively, paving the way for future advancements.