This inventor holds 1 USPTO granted patent. Top assignee: Tamar Technology, Inc.. Active years: 2010.
Company Filing History:
Years Active: 2010
Title: Michael A. Mahoney: Innovator in Wafer Measurement Technology
Introduction
Michael A. Mahoney is a notable inventor based in Chatsworth, CA (US). He has made significant contributions to the field of wafer measurement technology. His innovative approach has led to the development of a unique method and apparatus for measuring wafer characteristics.
Latest Patents
Mahoney holds a patent for a "Wafer measurement system and apparatus." This invention provides a method for accurately measuring wafer thickness, flatness, and trench depth. The system utilizes the back surface of the wafer to measure the trench effectively, employing a non-contact optical instrument. This instrument measures the wavelengths of both the top and bottom surfaces of the wafer, converting the distance between these wavelengths into a thickness measurement. The technology is particularly effective for wafers made of silicon, which is opaque in the visible region but transparent in the near-infrared region.
Career Highlights
Michael A. Mahoney is associated with Tamar Technology, Inc., where he continues to advance his research and development efforts. His work has garnered attention for its innovative approach to wafer measurement, which is crucial in various semiconductor applications.
Collaborations
Mahoney has collaborated with notable colleagues, including David S. Marx and David L. Grant. These partnerships have contributed to the successful development and implementation of his patented technologies.
Conclusion
Michael A. Mahoney's contributions to wafer measurement technology exemplify the spirit of innovation in the field. His patented methods enhance the accuracy and efficiency of wafer analysis, making a significant impact on the semiconductor industry.