Company Filing History:
Years Active: 2000-2003
Title: Michael A. Costantini: Innovator in Supercritical Fluid Technology
Introduction
Michael A. Costantini is a notable inventor based in Hudson, NH, with a focus on advancements in supercritical fluid technology. He holds five patents that showcase his innovative contributions to the semiconductor processing industry. His work emphasizes the importance of efficiency and precision in cleaning and processing semiconductor wafers.
Latest Patents
Among his latest patents is the "Supercritical Fluid Delivery and Recovery System for Semiconductor Wafer Processing." This invention presents a continuous flow, steady-state fluid delivery and recovery system designed for process chambers that require supercritical fluids and additives. It enables repetitive batch processing operations in an automated environment, particularly for supercritical carbon dioxide cleaning and processing of semiconductor wafers. The system is engineered for steady-state operation, allowing for rapid and repeated transitions of the process chamber between on and off-line states.
Another significant patent is the "Supercritical Fluid Cleaning Process for Precision Surfaces." This dry cleaning process utilizes materials such as carbon dioxide and various additives in gaseous and supercritical states. The method involves soak and agitation steps applied to the wafer, including rapid decompression of the process chamber after a soak period at higher supercritical pressure. This technique effectively weakens and breaks up polymers and other materials, followed by a supercritical fluid flush to remove loose debris.
Career Highlights
Michael has worked with several companies, including G.T. Equipment Technologies, Inc. and S.C. Fluids, Inc. His experience in these organizations has contributed to his expertise in the field of semiconductor processing and supercritical fluid applications.
Collaborations
Throughout his career, Michael has collaborated with notable professionals such as Mohan Chandra and Heiko D. Moritz. These partnerships have further enriched his work and innovations in the industry.
Conclusion
Michael A. Costantini's contributions to supercritical fluid technology have significantly impacted the semiconductor processing field. His innovative patents reflect his commitment to enhancing efficiency and precision in wafer processing. His work continues to inspire advancements in this critical area of technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.