Meng Fei Koh

Title: Innovations of Inventor Meng Fei Koh

Introduction

Meng Fei Koh is a notable inventor based in Singapore, recognized for his contributions to the field of chemical and mechanical polishing. He holds two patents that showcase his innovative approach to improving wafer carrier technology and membrane production.

Latest Patents

One of his latest patents is for a polishing head elbow fitting. This invention provides an improvement for a wafer carrier that features an annular inflatable tube designed to exert pressure on the edge of a perforated plate during the wafer dechucking process. The improvement includes a fixed elbow fitting that is secured to the head assembly in a specific orientation, ensuring that the flexible plastic tube supplying pressure to the inflatable tube is unobstructed. Additionally, a tool is provided to assist in fitting the elbow in the predetermined orientation, enhancing the efficiency of the wafer carrier.

Another significant patent by Meng Fei Koh is a process for producing improved membranes. This invention focuses on methods for enhancing the properties of flexible membranes used in chemical and mechanical polishing systems. The method involves subjecting the membrane to elevated temperatures, which contributes to its improved performance in polishing applications.

Career Highlights

Meng Fei Koh is currently employed at Systems on Silicon Manufacturing Company Pte. Ltd., where he continues to innovate in the field of semiconductor manufacturing. His work has significantly impacted the efficiency and effectiveness of polishing processes in the industry.

Collaborations

He has collaborated with notable coworkers, including Teck Leong Neo and Bing Wang, contributing to advancements in their shared field of expertise.

Conclusion

Meng Fei Koh's innovative patents and contributions to the semiconductor industry highlight his role as a significant inventor in Singapore. His work continues to influence the development of advanced polishing technologies.