Company Filing History:
Years Active: 2004
Title: Melissa M Hewson: Innovator in Semiconductor Technology
Introduction
Melissa M Hewson is a prominent inventor based in Plano, TX (US). She has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase her innovative spirit and technical expertise.
Latest Patents
One of her latest patents is titled "Nickel silicide—silicon nitride adhesion through surface passivation." This patent describes a process for forming nickel silicide and silicon nitride structures in semiconductor integrated circuit devices. Good adhesion between the nickel silicide and the silicon nitride is accomplished by passivating the nickel silicide surface with nitrogen. The passivation may be performed by treating the nickel silicide surface with plasma-activated nitrogen species. An alternative passivation method involves covering the nickel silicide with a film of metal nitride and heating the substrate to about 500°C. Another method includes sputter depositing silicon nitride on top of nickel silicide.
Her second patent is focused on an "Optimized metal fuse process." This process utilizes a thinner oxide (e.g., 6000 Å) over the top interconnect. The oxide is removed over the probe pads for testing but remains intact over the fuses. Due to the thin oxide at the upper corners of the fuse, it cracks during a laser pulse. A wet etch is then used to dissolve the exposed fuses.
Career Highlights
Melissa M Hewson is currently employed at Texas Instruments Corporation, where she continues to push the boundaries of semiconductor technology. Her work has been instrumental in developing innovative solutions that enhance the performance and reliability of electronic devices.
Collaborations
Some of her notable coworkers include Jiong-Ping Lu and Glenn J Tessmer, who have collaborated with her on various projects within the semiconductor field.
Conclusion
Melissa M Hewson is a trailblazer in semiconductor technology, with a proven track record of innovation and collaboration. Her patents reflect her commitment to advancing the industry and improving electronic device performance.