The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2004
Filed:
Nov. 30, 2001
Applicant:
Inventors:
Melissa M. Hewson, Plano, TX (US);
Ricky A. Jackson, Richardson, TX (US);
Abha Singh, Fairview, TX (US);
Toan Tran, Rowlett, TX (US);
Howard L. Tigelaar, Allen, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 4/00 ;
U.S. Cl.
CPC ...
H01S 4/00 ;
Abstract
A metal fuse process that uses a thinner (e.g., 6000 Å) oxide ( ) over the top interconnect ( ). The oxide ( ) is removed over the probe pads ( ) for testing but is not removed over the fuses ( ). Because the oxide ( ) is thin at the upper corners of the fuse ( ), the oxide ( ) cracks over the fuse ( ) during a laser pulse ( ). A wet etch is then used to dissolve the exposed fuses ( ).