Company Filing History:
Years Active: 2006-2007
Title: Innovations by Mehran Asdigha
Introduction
Mehran Asdigha is a notable inventor based in Shrewsbury, MA (US). He has made significant contributions to the field of scanning technology, holding a total of 4 patents. His work primarily focuses on enhancing the efficiency and effectiveness of wafer scanning systems.
Latest Patents
One of his latest patents is a "Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights." This invention is directed to a scanning apparatus and method for processing a workpiece. The scanning apparatus comprises a wafer arm and a moving arm that are fixedly coupled to one another, allowing them to rotate about a first axis. An end effector, whereon the workpiece resides, is coupled to the wafer arm. A rotational shaft connects the wafer arm and moving arm to a first actuator, which provides a rotational force to the shaft. Additionally, a momentum balance mechanism is coupled to the shaft, operable to generally reverse the rotational direction of the shaft. This mechanism includes one or more fixed spring elements that provide a force to a moving spring element coupled to the moving arm. A controller is also included to maintain a generally constant translational velocity of the end effector within a predetermined scanning range.
Another significant patent is the "Mechanical oscillator for wafer scan with spot beam." This invention also focuses on a scanning apparatus and method for processing a substrate. The apparatus consists of a first link and a second link that are rigidly coupled at a first joint. These links are rotatably coupled to a base portion, defining a first axis. An end effector, whereon the substrate resides, is coupled to the first link. The second link is connected to a first actuator via a second joint, allowing for oscillatory movement along a first scan path. A controller is included to maintain a constant translational velocity of the end effector within a predetermined scanning range.
Career Highlights
Mehran Asdigha is currently employed at Axcelis Technologies, Inc., where he continues to innovate in the field of semiconductor manufacturing equipment. His work has significantly impacted the efficiency of wafer processing technologies.
Collaborations
Throughout his career, Mehran has collaborated with notable colleagues, including Kan Ota and Kurt D Cleveland. These collaborations have further enhanced the development of advanced scanning technologies.
Conclusion