The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2006
Filed:
May. 06, 2004
Mehran Asdigha, Shrewsbury, MA (US);
Kurt D. Cleveland, Beverly, MA (US);
Jay Krishnasamy, Billerica, MA (US);
Kan Ota, Cambridge, MA (US);
Mehran Asdigha, Shrewsbury, MA (US);
Kurt D. Cleveland, Beverly, MA (US);
Jay Krishnasamy, Billerica, MA (US);
Kan Ota, Cambridge, MA (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
The present invention is directed to a scanning apparatus and method for processing a substrate, wherein the scanning apparatus comprises a first link and a second link rigidly coupled to one another at a first joint, wherein the first link and second link are rotatably coupled to a base portion by the first joint, therein defining a first axis. An end effector, whereon the substrate resides, is coupled to the first link. The second link is coupled to a first actuator via at least second joint. The first actuator is operable to translate the second joint with respect to the base portion, therein rotating the first and second links about the first axis and translating the substrate along a first scan path in an oscillatory manner. A controller is further operable to maintain a generally constant translational velocity of the end effector within a predetermined scanning range.