Mayur Trivedi

Title: Innovations of Mayur Trivedi

Introduction

Mayur Trivedi is a notable inventor based in Fremont, California. He has made significant contributions to the field of semiconductor device processing, holding a total of four patents. His work focuses on advanced methods and apparatuses that enhance the efficiency and effectiveness of substrate processing.

Latest Patents

Trivedi's latest patents include innovative methods for depositing a cobalt layer using a carousel batch deposition reactor. This method involves providing a substrate to a rotatable support, exposing it to a cobalt-containing precursor, and subsequently annealing the substrate to remove contaminants. Another significant patent involves semiconductor device processing tools and methods for patterning substrates. This system includes subsystems designed to carry out various processes on substrates, enabling the formation of reduced-pitch patterns.

Career Highlights

Throughout his career, Mayur Trivedi has worked with prominent companies in the semiconductor industry, including Novellus Systems Incorporated and Applied Materials, Inc. His experience in these organizations has allowed him to develop and refine his innovative techniques in substrate processing.

Collaborations

Trivedi has collaborated with esteemed colleagues such as Srinivasan Sundararajan and Sushil Padiyar. These collaborations have contributed to the advancement of technology in the semiconductor field.

Conclusion

Mayur Trivedi's contributions to semiconductor processing through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative methods continue to shape the future of technology in this field.