This inventor holds 1 USPTO granted patent and 1 published patent application and 1 EPO patent. Top assignee: Alcatel. Active years: 2006.
Company Filing History:
Years Active: 2006
Title: The Innovative Mind of Matthieu Morpain
Introduction
Matthieu Morpain, an inventive engineer based in Pouilley les Vignes, France, has made significant contributions to the field of radiation technology. With a focus on extreme ultraviolet (EUV) sources, Morpain's work has implications for advancements in various technological domains, particularly in semiconductor manufacturing.
Latest Patents
Morpain holds a noteworthy patent for an EUV radiation source, which is described in detail as comprising an irradiation chamber containing an irradiation zone. This zone generates a stream of radiation-generator material, specifically a flow of xenon, that propagates in a transverse direction relative to an optical axis. The innovative design allows power laser beams to strike the xenon stream, producing EUV radiation that then passes through a diaphragm and is conditioned by elliptical mirrors in a transmission chamber. This setup enables the effective transmission of EUV radiation to a usage zone with minimal attenuation while maintaining a low-pressure environment.
Career Highlights
Morpain's career is defined by his role within Alcatel, a company recognized for its advanced technology solutions. His groundbreaking patent showcases his ability to blend engineering principles with practical applications, positioning him as a prominent figure in the field of optics and radiation.
Collaborations
Throughout his career, Matthieu Morpain has collaborated with notable colleagues, including Benoit Barthod and Jean-Luc Rival. These partnerships highlight the collective effort in driving innovation and enhancing technical developments within their industry.
Conclusion
Matthieu Morpain's contributions to the field of EUV radiation sources exemplify the spirit of innovation that drives progress in technology. His patent not only reflects a deep understanding of engineering principles but also paves the way for future advancements in the semiconductor industry, reinforcing the importance of collaborative efforts in achieving technological feats.