Company Filing History:
Years Active: 2013
Title: Matthias Wächter: Innovator in Photolithography Mask Verification
Introduction
Matthias Wächter, based in Jena, Germany, is recognized for his innovative contributions in the field of photolithography. With a focus on enhancing the accuracy of repairs on photolithography masks, Wächter's work exemplifies the integration of precision engineering and verification methodologies in modern manufacturing processes.
Latest Patents
Wächter holds a patent for a "Verification method for repairs on photolithography masks." This invention provides a systematic approach for verifying repairs made on photolithography masks. The process begins with inspecting a fabricated mask for defects and logging the positions of those defects into a file. Once repairs are executed, aerial images of the repaired positions are captured and analyzed against established tolerance criteria for various target parameters. The verification process involves simulating desired structures, comparing simulated images with actual captures, and making informed decisions on repair verification.
Career Highlights
Wächter plays a significant role at Carl Zeiss SMS Ltd., where he continues to develop and innovate within the field of photolithography. His work not only enhances the reliability of semiconductor manufacturing but also supports advancements in various industries that rely on photolithographic technologies.
Collaborations
Throughout his career, Wächter has collaborated with esteemed colleagues, including Thomas Scherübl and Hans Van Doornmalen. Their teamwork fosters an environment of innovation and creativity, leading to meaningful developments in photolithography verification techniques.
Conclusion
Matthias Wächter stands out as a key inventor within the photolithography sector, contributing valuable advancements through his patented methods. His collaborative efforts and innovative spirit continue to propel the industry forward, ensuring more precise manufacturing processes that align with today's technological demands.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.