Location History:
- Dallas, TX (US) (2004)
- Allen, TX (US) (2004 - 2009)
Company Filing History:
6 out of 73 
2 out of 37 
1 out of 295 
Years Active: 2004-2009
Title: The Innovative Contributions of Matthew L. Fisher
Introduction
Matthew L. Fisher, based in Allen, TX, is a distinguished inventor known for his significant contributions to the field of semiconductor manufacturing. With a remarkable portfolio that includes nine patents, Fisher’s work focuses on advancements that enhance the efficiency and efficacy of various manufacturing processes.
Latest Patents
Among his notable inventions, Fisher holds patents that include the design and development of an alkaline chemistry for post-CMP cleaning, which primarily employs tetra alkyl ammonium hydroxide. This innovative approach discusses the cleaning of semiconductor wafers post-Chemical-Mechanical Planarization (CMP), a crucial step in semiconductor device fabrication. The method effectively removes residual slurry particles, particularly metal particles such as copper, from wafer surfaces without causing significant etching or contamination, while also protecting the metal from oxidation and corrosion through the incorporation of strong chelating agents.
Another significant patent by Fisher describes a method for forming dielectric and metallic films. This process involves the production of metal silicon (oxy)nitride using a carbon-free silicon source alongside a metal precursor and an oxidizing agent in a Chemical Vapor Deposition (CVD) chamber. The resulting films, which may include MsiN, MSIo, and MSiON, serve as high-k dielectric materials, crucial for improving device performance.
Career Highlights
Throughout his career, Fisher has contributed to the advancement of technology while working with prominent companies like Air Liquide America and Air Liquide Electronics U.S. LP. His professional journey showcases a deep commitment to innovation and technical excellence in the semiconductor industry.
Collaborations
In his endeavors, Matthew L. Fisher collaborated with fellow innovator Ashutosh Misra. Their combined expertise has undoubtedly led to advancements that push the boundaries of technology in manufacturing processes.
Conclusion
Matthew L. Fisher exemplifies what it means to be an innovator in the semiconductor manufacturing sector. Through his nine patents and collaborative efforts, he plays a critical role in shaping the future of technology, ensuring enhanced efficiency in semiconductor device production. His contributions continue to impact the field significantly, making him a pivotal figure to watch in the landscape of innovations.