Company Filing History:
Years Active: 1999-2001
Title: Matthew Charles Gwinn: Innovator in Ion Source Technology
Introduction
Matthew Charles Gwinn is a notable inventor based in Salem, MA (US). He has made significant contributions to the field of ion source technology, holding 2 patents that showcase his innovative approach to ion implantation systems.
Latest Patents
One of his latest patents is for a Multi-cusp ion source. This invention includes a plasma confinement chamber and a plasma electrode that forms a generally planar wall section of the plasma confinement chamber. The plasma electrode features at least one opening that allows an ion beam to exit the confinement chamber and is equipped with a set of magnets that generate a magnetic field extending across the openings in the plasma electrode. The openings can be fashioned as elongated slots or circular openings aligned along the axis. Additionally, the ion source can include a power supply for negatively biasing the plasma electrode relative to the plasma confinement chamber and an insulator for electrically insulating the plasma electrode. Cooling tubes can also be provided to transfer heat away from the magnets in the plasma electrode.
Another significant patent is for a method of implanting low doses of ions into a substrate. This invention provides an ion implantation system that employs an ion source for ionizing and implanting a noble diluent gas and a particular dopant gas into a substrate. The noble diluent gas does not react with the dopant gas or with dopant residue, allowing for accurate and stable low-dose implants. This precise control over the dosage of dopant ions implanted into the substrate is especially beneficial in low-dose applications.
Career Highlights
Matthew Charles Gwinn is currently associated with Eaton Corporation, where he continues to develop innovative technologies in the field of ion sources. His work has contributed to advancements in ion implantation systems, enhancing their efficiency and precision.
Collaborations
He collaborates with Adam A Brailove, working together to push the boundaries of ion source technology and improve the applications of their inventions.
Conclusion
Matthew Charles Gwinn is a prominent inventor whose work in ion source technology has led to significant advancements in the field. His patents reflect his commitment to innovation and precision in ion implantation systems.