Company Filing History:
1 out of 15,502 
1 out of 164,219 
Years Active: 1993-2002
Title: The Innovations of Matthew A Thompson
Introduction
Matthew A Thompson is a notable inventor based in Austin, TX. He has made significant contributions to the field of technology, particularly in the area of mask substrates and x-ray scanning methods. With a total of 2 patents, his work has garnered attention for its innovative approaches and practical applications.
Latest Patents
One of Thompson's latest patents is focused on coatings on reflective mask substrates. This process involves depositing a coating on one or both sides of a low thermal expansion material EUVL mask substrate. The aim is to improve defect inspection, surface finishing, and defect levels. Additionally, a high dielectric coating is applied to the backside to facilitate electrostatic chucking and correct any bowing caused by stress imbalances. The use of materials such as TaSi may also be incorporated to balance stress effectively.
Another significant patent is the x-ray beam scanning method for producing low distortion or constant images. This method directs an x-ray beam at a collimating first mirror, which can alter the source to mirror location and/or grazing angle of incidence. The beam is then reflected from a flat second mirror capable of scanning motion through linear translation, with optional angular changes in the grazing angle of incidence.
Career Highlights
Matthew A Thompson has worked with prestigious organizations, including the University of California and IBM. His experience in these institutions has allowed him to develop and refine his innovative ideas, contributing to advancements in technology.
Collaborations
Throughout his career, Thompson has collaborated with notable individuals such as William Man-Wai Tong and John S Taylor. These partnerships have played a crucial role in the development of his patents and innovations.
Conclusion
Matthew A Thompson's contributions to technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the field, showcasing the importance of innovation in advancing technology.