Matt G Goodman

Title: Matt G Goodman: Innovator in Substrate Support Systems

Introduction

Matt G Goodman is a notable inventor based in Chandler, AZ (US). He has made significant contributions to the field of substrate support systems, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of substrate handling in various applications.

Latest Patents

One of his latest patents is a substrate support system designed for reduced autodoping and backside deposition. This innovative system comprises a substrate holder with multiple passages extending between its top and bottom surfaces. The substrate holder supports the peripheral portion of the substrate backside, creating a thin gap between the substrate and the holder. A hollow support member is integrated to provide support to the underside and is configured to convey gas upward into the passages of the substrate holder. The upwardly conveyed gas flows into the gap, either moving outward and upward around the substrate edge to inhibit backside deposition of reactant gases or downward through passages that do not lead back into the hollow support member, effectively sweeping out-diffused dopant atoms away from the substrate backside.

Career Highlights

Matt G Goodman is currently employed at Asm America, Inc., where he continues to develop innovative solutions in substrate support systems. His expertise and dedication to his work have positioned him as a key player in his field.

Collaborations

Throughout his career, Matt has collaborated with talented individuals such as Mike Halpin and Jereon Stoutyesdijk. These collaborations have further enriched his work and contributed to the advancement of substrate support technologies.

Conclusion

Matt G Goodman is a distinguished inventor whose work in substrate support systems has made a significant impact in the industry. His innovative patents and collaborations highlight his commitment to advancing technology in this field.