Company Filing History:
Years Active: 2004-2007
Title: Mathias Koch: Innovator in Semiconductor Thermal Processing
Introduction
Mathias Koch is a notable inventor based in Andover, MA (US), recognized for his contributions to semiconductor thermal processing technology. With a total of 3 patents to his name, he has made significant advancements in the field, particularly in the area of thermal cooling systems for semiconductor substrates.
Latest Patents
One of Mathias Koch's latest patents is a segmented cold plate for rapid thermal processing (RTP) tool designed for conduction cooling. This invention focuses on a semiconductor thermal processing system that includes an apparatus for thermally cooling a semiconductor substrate. The segmented cold plate is situated within a process chamber, allowing its segments to radially translate between engaged and disengaged positions. This design enables a substrate holder to pass between the segments when they are disengaged. Additionally, the system features an elevator that linearly translates the substrate between a heating position near a heater assembly and a cooling position near the segmented cold plate. The cold plate is equipped with holes for gas flow, which can be controlled to optimize cooling based on temperature feedback from sensors.
Career Highlights
Mathias Koch is currently employed at Axcelis Technologies, Inc., where he continues to innovate in semiconductor technology. His work has been instrumental in enhancing the efficiency and effectiveness of thermal processing systems.
Collaborations
Throughout his career, Mathias has collaborated with notable colleagues, including Douglas A Brown and David Tao, contributing to a dynamic and innovative work environment.
Conclusion
Mathias Koch's contributions to semiconductor thermal processing exemplify the impact of innovation in technology. His patents reflect a commitment to advancing the field and improving semiconductor manufacturing processes.