This inventor holds 2 USPTO granted patents and 2 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2017.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2017
Title: Masayuki Shintaku: Innovator in Plasma Processing Technology
Introduction
Masayuki Shintaku is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 2 patents. His work focuses on developing advanced apparatuses that enhance the efficiency and effectiveness of plasma processing.
Latest Patents
Shintaku's latest patents include a plasma processing apparatus designed to excite a processing gas using microwave technology. This apparatus features a focus ring that extends in an annular shape, a first tubular member wrapped around a central axis, and an annular member made of dielectric material. The design incorporates a choke portion that suppresses microwave propagation, ensuring optimal performance.
Another significant patent is a plasma processing apparatus that includes a mounting table with a lower electrode and an electrostatic chuck. This system is equipped with a high-frequency power supply, a heater, and a filter unit, all working together to enhance the plasma processing capabilities. The choke portion in this design also plays a crucial role in suppressing microwave propagation, showcasing Shintaku's innovative approach to plasma technology.
Career Highlights
Masayuki Shintaku is currently associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has been instrumental in advancing plasma processing technologies, contributing to the development of more efficient manufacturing processes.
Collaborations
Shintaku has collaborated with notable colleagues such as Takashi Suzuki and Masahiko Konno. Their combined expertise has fostered innovation and progress in the field of plasma processing.
Conclusion
Masayuki Shintaku's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the industry. His advancements continue to influence the efficiency of manufacturing processes in the semiconductor sector.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile