Masato Kurita

Title: Masato Kurita: Innovator in Polishing Technology

Introduction

Masato Kurita is a notable inventor based in Kanagawa-ken, Japan. He has made significant contributions to the field of polishing technology, holding two patents that showcase his innovative approach to improving polishing apparatuses.

Latest Patents

Kurita's latest patents include a polishing apparatus that comprises a polishing tool, a substrate holding member, and a sensor for detecting a failure of a substrate to be polished. Another patent discloses a polishing apparatus that includes a measuring device to measure a drive current of a drive unit while the drive unit drives at least one of the polishing tool and the substrate holding member. This invention features a failure detection unit that can identify either the jumping of the substrate from the substrate member or the breakage of the substrate. During a polishing operation, the failure detection unit detects these issues based on comparisons of the drive current with a threshold value or a predetermined waveform pattern.

Career Highlights

Throughout his career, Masato Kurita has worked with Ebara Corporation, where he has likely contributed to advancements in polishing technologies. His work has been instrumental in enhancing the efficiency and reliability of polishing processes.

Collaborations

Kurita has collaborated with notable colleagues such as Koji Ono and Shozo Oguri, further enriching his professional experience and contributions to the field.

Conclusion

Masato Kurita's innovative patents and career achievements highlight his significant role in the development of polishing technology. His work continues to influence the industry and pave the way for future advancements.