The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2006
Filed:
Aug. 21, 2003
Applicants:
Koji Ono, Kanagawa-ken, JP;
Shozo Oguri, Kanagawa-ken, JP;
Kenichi Sasabe, Tokyo, JP;
Masato Kurita, Kanagawa-ken, JP;
Yasuhisa Kojima, Kanagawa-ken, JP;
Tadanori Egawa, Kanagawa-ken, JP;
Kenichi Shigeta, Kanagawa-ken, JP;
Inventors:
Koji Ono, Kanagawa-ken, JP;
Shozo Oguri, Kanagawa-ken, JP;
Kenichi Sasabe, Tokyo, JP;
Masato Kurita, Kanagawa-ken, JP;
Yasuhisa Kojima, Kanagawa-ken, JP;
Tadanori Egawa, Kanagawa-ken, JP;
Kenichi Shigeta, Kanagawa-ken, JP;
Assignees:
Ebara Corporation, Tokyo, JP;
Kabushiki Kaisha Toshiba, Kanagawa-ken, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 49/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A polishing apparatus comprises a polishing tool, a substrate holding member, and a sensor for detecting a failure of a substrate to be polished.