Nagano, Japan

Masashi Maruta

USPTO Granted Patents = 2 

 

Average Co-Inventor Count = 1.3

ph-index = 1

Forward Citations = 6(Granted Patents)


Company Filing History:


Years Active: 2009-2024

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2 patents (USPTO):Explore Patents

Title: Masashi Maruta: Innovator in Double-Sided Polishing Technology

Introduction

Masashi Maruta is a notable inventor based in Nagano, Japan. He has made significant contributions to the field of polishing technology, particularly with his innovative double-sided polishing apparatus. With a total of 2 patents to his name, Maruta continues to push the boundaries of engineering and manufacturing.

Latest Patents

Maruta's latest patents include a double-sided polishing apparatus designed to enhance the efficiency and accuracy of polishing disk-shaped workpieces. The first patent describes a system that incorporates a lower surface plate, an upper surface plate, and a carrier that holds the workpiece. This apparatus features a thickness measuring sensor that can be positioned either above or below the surface plates. The design allows for precise measurement of the workpiece's thickness, ensuring that both the outer and center parts of the wafer are polished effectively.

The second patent further refines the double-sided polishing apparatus, emphasizing the ability to measure the thickness of a wafer accurately. This version includes a lower polishing plate, an upper polishing plate, and a carrier with a through-hole for holding the wafer. An optical thickness measuring equipment is integrated into the frame, utilizing a laser beam to calculate the wafer's thickness based on reflected beams. This innovation significantly improves the reliability of the polishing process.

Career Highlights

Masashi Maruta is currently employed at Fujikoshi Machinery Corporation, where he applies his expertise in polishing technology. His work has been instrumental in advancing the capabilities of the company's products, particularly in the semiconductor industry.

Collaborations

Maruta collaborates with Susumu Onishi, a fellow innovator in the field. Their combined efforts contribute to the development of cutting-edge technologies that enhance manufacturing processes.

Conclusion

Masashi Maruta's contributions to double-sided polishing technology exemplify his commitment to innovation and excellence. His patents reflect a deep understanding of engineering principles and a dedication to improving manufacturing efficiency. Through his work at Fujikoshi Machinery Corporation, Maruta continues to influence the industry positively.

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