This inventor holds 8 USPTO granted patents. Top assignee: Yamaha Corporation. Active years: 1995-2000.
Company Filing History:
Years Active: 1995-2000
Title: The Innovative Contributions of Masaru Naito
Introduction
Masaru Naito is a prominent inventor based in Hamamatsu, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 8 patents. His work focuses on methods for forming and fabricating multi-layered wiring, which are crucial for modern electronic devices.
Latest Patents
Naito's latest patents include a method of forming a wiring layer and a method of fabricating multi-layered wiring. The method of forming a wiring layer involves depositing an interlayer insulating film on a substrate with a conductive region. A connection hole is created to expose the conductive region, which is then filled with a conductive plug. An underlying layer made of titanium is deposited over the entire surface, followed by a wiring layer made of aluminum alloy. This innovative approach ensures that the upper wiring layer connects effectively to the lower conductive region without compromising resistance to electromigration.
The method of fabricating multi-layered wiring involves forming a wiring layer through sputtering, reflowing, and patterning of an aluminum alloy layer on insulating layers. A silicon oxide layer is created through a series of heat treatments and plasma-enhanced chemical vapor deposition. This method has demonstrated high resistance to stress migration, as evidenced by measurements showing no resistance rise in via chains with 20,000 vias.
Career Highlights
Masaru Naito is currently employed at Yamaha Corporation, where he continues to push the boundaries of innovation in semiconductor technology. His work has been instrumental in developing reliable and efficient wiring methods that enhance the performance of electronic devices.
Collaborations
Naito has collaborated with notable colleagues such as Takahisa Yamaha and Yushi Inoue. Their combined expertise has contributed to the advancement of technologies in the semiconductor industry.
Conclusion
Masaru Naito's innovative patents and contributions to semiconductor technology highlight his importance as an inventor. His work not only advances the field but also sets a foundation for future developments in electronic devices.