Inventors with similar research interests:
Location History:
- Yokosuka, JP (1982 - 1985)
- Inagi, JP (1997 - 1999)
- Sagamihara, JP (1987 - 2000)
- Kawasaki, JP (1988 - 2004)
- Tokyo, JP (2008)
- Kanagawa, JP (1984 - 2009)
- Utsunomiya, JP (2016 - 2019)
Company Filing History:
74 out of 90,753 
2 out of 4,979 Years Active: 1982-2019
Areas of Expertise:
Title: **Masanori Yamada: A Pioneer in Lithography Technology**
Introduction:
Masanori Yamada is an esteemed inventor based in Kawasaki, Japan, known for his remarkable contributions to the field of lithography technology. With an impressive portfolio of 76 patents, Yamada has made significant strides in enhancing the accuracy and efficiency of lithography apparatuses, which are crucial for modern manufacturing processes.
Latest Patents:
Masanori Yamada's latest patents include innovative technologies aimed at improving lithography apparatuses. One of his notable patents focuses on a lithography apparatus designed to suppress decreases in the accuracy of stage control. This apparatus features a moving unit that can move with an original or substrate mounted thereon, equipped with multiple measurement units that overlap in their measurement areas. The control unit intelligently switches the measurement units based on an overlapping measurement area, allowing for improved precision during multiple processes on various processing targets.
Additionally, his patent related to the stage apparatus outlines a system incorporating a coarse moving stage and a fine moving stage, which work in tandem to enhance the performance of lithography. This system utilizes an electromagnetic actuator to facilitate rapid adjustments in position, ensuring precise movement and control within the manufacturing process.
Career Highlights:
Yamada has had an illustrious career, with his expertise being shaped through his work at leading technology firms such as Canon Inc. and Oki Electric Industry Co., Ltd. His innovative approaches and profound understanding of lithography have positioned him as a key figure in the engineering community, paving the way for advancements in semiconductor manufacturing.
Collaborations:
Throughout his career, Masanori Yamada has collaborated with talented colleagues, including Hiroyuki Kataoka and Nobuyuki Suzuki. These partnerships have fostered a collaborative environment, leading to groundbreaking innovations within the realm of lithography and device manufacturing.
Conclusion:
Masanori Yamada's contributions to lithography technology through his patents and collaborations exemplify his dedication to innovation. His work continues to influence the industry, providing valuable advancements that enhance the capabilities of manufacturing processes. As technology progresses, Yamada's inventions will undoubtedly remain integral to the future of lithography and semiconductor production.