The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
Nov. 24, 2014
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Masanori Yamada, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/58 (2006.01); G01B 11/14 (2006.01); G03F 7/20 (2006.01); G01B 9/02 (2006.01);
U.S. Cl.
CPC ...
G01B 11/14 (2013.01); G01B 9/02027 (2013.01); G03F 7/70725 (2013.01); G03F 7/70775 (2013.01);
Abstract
An apparatus, includes first and second measurement devices configured to measure a position in a first direction of a moving body; a drive unit configured to drive the moving body in the first direction; a controller configured to generate a control input for driving the drive unit, based on a control deviation in accordance with position command information in the first direction of the moving body and position measurement information from the first or second measurement device, and a control parameter set to a certain value.