Company Filing History:
Years Active: 2016-2025
Title: Masakuni Miyazawa: Innovator in Electrostatic Chuck Technology
Introduction
Masakuni Miyazawa is a notable inventor based in Nagano, Japan. He has made significant contributions to the field of electrostatic chuck technology, holding a total of four patents. His work focuses on devices that enhance substrate fixing and handling in various applications.
Latest Patents
Miyazawa's latest patents include a substrate fixing device and an electrostatic chuck. The substrate fixing device features an electrostatic chuck mounted on a baseplate, incorporating a porous body within a gas hole that pierces through the substrate. This innovative design allows the electrostatic chuck to attract objects onto the substrate's surface effectively. The gas hole is designed with a first recess and a second recess, which are filled partially with the porous body, optimizing the chuck's performance. Another patent details an electrostatic chuck that includes a base with a surface for object placement and a through hole containing a porous material made of angular ceramic particles. This design enhances the chuck's ability to hold substrates securely.
Career Highlights
Miyazawa has established himself as a key figure in the field of electrostatic technology through his innovative designs and patents. His work has contributed to advancements in substrate handling, which is crucial for various industrial applications.
Collaborations
Miyazawa has collaborated with notable colleagues, including Michio Horiuchi and Kazuyoshi Miyamoto. Their combined expertise has furthered the development of cutting-edge technologies in the field.
Conclusion
Masakuni Miyazawa's contributions to electrostatic chuck technology demonstrate his innovative spirit and dedication to advancing the field. His patents reflect a commitment to improving substrate handling and fixing devices, making a significant impact in the industry.