The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2025
Filed:
Sep. 02, 2020
Shinko Electric Industries Co., Ltd., Nagano, JP;
Masakuni Miyazawa, Nagano, JP;
SHINKO ELECTRIC INDUSTRIES CO., LTD., Nagano, JP;
Abstract
A substrate fixing device includes an electrostatic chuck on a baseplate, and a porous body in a gas hole piercing through a substrate of the electrostatic chuck. The electrostatic chuck attracts an object onto a first surface of the substrate. The gas hole includes a first recess formed in a second surface of the substrate facing the baseplate and depressed toward the first surface, a second recess formed at the bottom of the first recess and depressed toward the first surface, and a through hole extending from the bottom of the second recess to the first surface. The first recess is entirely and the second recess is partly filled with the porous body. A region of the second recess unfilled with the porous body is a recess in the porous body depressed toward the second surface relative to where the bottom of the second recess communicates with the through hole.