Saitama, Japan

Masaki Satake


Average Co-Inventor Count = 3.0

ph-index = 1

Forward Citations = 2(Granted Patents)


Company Filing History:


Years Active: 2020

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1 patent (USPTO):Explore Patents

Title: Biography of Masaki Satake

Introduction

Masaki Satake is a notable inventor based in Saitama, Japan. He has made significant contributions to the field of photomask technology, particularly in the area of extreme ultraviolet lithography.

Latest Patents

Masaki Satake holds a patent for "Dispositioning defects detected on extreme ultraviolet photomasks." This patent outlines methods and systems for photomask defect dispositioning. One of the methods includes directing energy to a photomask and detecting energy from it. The photomask is specifically configured for use at one or more extreme ultraviolet wavelengths of light. The method also involves detecting defects on the photomask based on the detected energy. Additionally, it includes generating charged particle beam images of the photomask at locations of the detected defects. Finally, the method encompasses dispositioning the detected defects based on the charged particle beam images generated for those defects.

Career Highlights

Masaki Satake is currently employed at Kla Corporation, where he continues to innovate in the field of photomask technology. His work has been instrumental in advancing the capabilities of extreme ultraviolet lithography.

Collaborations

Throughout his career, Masaki has collaborated with several talented individuals, including Vikram Tolani and Weston L Sousa. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor industry.

Conclusion

Masaki

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