Masaki Ozaki

Title: The Innovative Mind of Masaki Ozaki: A Pioneer in Electrostatic Technology

Introduction

Masaki Ozaki, an accomplished inventor based in Tokyo, Japan, has made significant contributions to the field of electrostatic technology. With a portfolio of five patents, his work has paved the way for advancements in various applications, highlighting his role as a leading innovator in his field.

Latest Patents

Ozaki's recent patents focus on sophisticated electrostatic chuck devices. One patent describes an electrostatic chuck device that features an electrostatic chuck part with a sample placing surface and a first electrode designed for electrostatic attraction. This invention also includes a cooling base part that effectively cools the electrostatic chuck part, along with an adhesive layer that securely bonds both components. The unique design incorporates a recess and protrusion on the adhesive layer side, adhering to specific sheet resistance criteria.

Another noteworthy patent introduces a method for producing an electrostatic chuck device which includes a comprehensive setup with a mounting table equipped with a mounting surface for placement of plate-shaped samples. This innovative device features an annular focus ring and a cooling element that maintains optimal temperature. The holding portion of the mounting table has been meticulously engineered to ensure precise contact with the focus ring, given specific surface roughness and flatness requirements that elevate the reliability of the device's performance.

Career Highlights

Ozaki’s impressive career is marked by his work at Sumitomo Osaka Cement Co., Ltd., where he has had the opportunity to develop groundbreaking technologies. His compilation of patents not only signifies his technical expertise but also his commitment to innovation within the field of electrostatics.

Collaborations

Throughout his career, Ozaki has collaborated closely with talented coworkers such as Keisuke Maeda and Mamoru Kosakai. These partnerships have fostered an environment of creativity and have led to the successful development of numerous technologies that continue to push the boundaries of electrostatic applications.

Conclusion

Masaki Ozaki stands as a testament to the power of innovation and collaboration in the modern technological landscape. His contributions, particularly in the realm of electrostatic chuck devices, exemplify his vision and dedication to enhancing the functionality and reliability of electronic devices. As he continues to innovate, the impact of his work will undoubtedly resonate within the industry for years to come.