The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2022
Filed:
Jul. 19, 2019
Sumitomo Osaka Cement Co., Ltd., Tokyo, JP;
Masaki Ozaki, Tokyo, JP;
Norito Morishita, Tokyo, JP;
SUMITOMO OSAKA CEMENT CO., LTD., Tokyo, JP;
Abstract
An electrostatic chuck device () including: an electrostatic chuck part () which includes a base material () having a mounting surface () on which a plate-like sample W is mounted, and an internal electrostatic attraction electrode () which electrostatically attracts the plate-like sample (W) to the mounting surface (); a cooling base part () which is configured to cool the electrostatic chuck part (); and an adhesive layer () which is interposed therebetween, in which a shape of the mounting surface of the base material () includes a concave surface () or a convex surface, which is a curved surface that gradually curves from a center () of the mounting surface () toward an outer periphery () of the mounting surface () and includes no inflection point, and an absolute value of a difference between a height of a center of the concave surface () or the convex surface from a position of a main surface () of the cooling base part () as a reference and a height of an outer periphery of the concave surface () or the convex surface from the position of the main surface () of the cooling base part () as a reference is 1 μm or higher and 30 μm or lower.