Masahito Eguchi

Title: Masahito Eguchi: Innovator in Electrostatic Chuck Technology

Introduction

Masahito Eguchi is a prominent inventor based in Chita-gun, Japan. He has made significant contributions to the field of electrostatic chuck technology, holding a total of 3 patents. His work focuses on methods that enhance the efficiency and functionality of electrostatic chucks used in various applications.

Latest Patents

Masahito Eguchi's latest patents include innovative methods for producing electrostatic chucks. One notable patent describes a method that involves several steps: placing a ceramic slurry in a molding die, gelatinizing the slurry, and obtaining ceramic molded bodies. The process continues with drying, debinding, and calcining these bodies, followed by printing an electrostatic electrode paste to form a dielectric layer. Finally, the ceramic bodies are superposed and subjected to hot-press firing. Another patent outlines a disassembly and reuse method for substrate mounting members, which involves heating a substrate mounting member to a thermal decomposition temperature to separate an electrostatic chuck from a base member.

Career Highlights

Masahito Eguchi is currently employed at NGK Insulators, Inc., where he continues to develop and refine technologies related to electrostatic chucks. His expertise and innovative approaches have positioned him as a key figure in his field.

Collaborations

Throughout his career, Masahito has collaborated with notable colleagues, including Hideyoshi Tsuruta and Tetsuya Kawajiri. These collaborations have further advanced the research and development of electrostatic chuck technologies.

Conclusion

Masahito Eguchi's contributions to electrostatic chuck technology demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of materials and processes that enhance the performance of electrostatic chucks. His work continues to influence the industry and pave the way for future advancements.