Masahiko Tamaru

Title: Masahiko Tamaru: Innovator in Semiconductor Technology

Introduction

Masahiko Tamaru is a notable inventor based in Yamaguchi, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding two patents that showcase his innovative approach to technology.

Latest Patents

Tamaru's latest patents include an electrostatic chuck module and a brine supply unit. The electrostatic chuck module is designed for semiconductor manufacturing apparatuses and features a cooling system that prevents penetration leaks. This module incorporates an electrostatic chuck plate made of alumina and a cooling plate bonded to it, which is crafted from a Cu-based composite material. By adjusting the ratios of copper and nickel, along with tungsten and molybdenum, Tamaru has developed a highly thermally conductive material that matches the thermal expansion coefficient of alumina. His brine supply unit is engineered to control the temperature of brine supplied to loads. It includes a heat exchanger for cooling, a heater for heating, and a mixing section to blend the two, ensuring stable temperature management.

Career Highlights

Throughout his career, Masahiko Tamaru has worked with prominent companies such as Toto Ltd. and Canon Anelva Corporation. His experience in these organizations has allowed him to refine his skills and contribute to advancements in semiconductor technology.

Collaborations

Tamaru has collaborated with notable colleagues, including Noriaki Tateno and Jun Miyaji. Their teamwork has fostered an environment of innovation and creativity in their respective projects.

Conclusion

Masahiko Tamaru's contributions to semiconductor technology through his patents and collaborations highlight his role as a significant inventor in the field. His work continues to influence advancements in manufacturing processes and materials.