Location History:
- Hyogo, JP (1992)
- Itami, JP (1989 - 1993)
- Tokyo, JP (2000 - 2003)
Company Filing History:
Years Active: 1989-2003
Title: Inventor Masahiko Ikeno: Innovations in Semiconductor Inspection
Introduction
Masahiko Ikeno, a prominent inventor based in Itami, Japan, has made significant contributions to the field of semiconductor inspection technology. With a remarkable portfolio of 11 patents, Ikeno's innovations have been vital in enhancing the accuracy and efficiency of semiconductor manufacturing processes.
Latest Patents
Ikeno's latest patents showcase his expertise and dedication to improving semiconductor inspection methods. One of his notable inventions is a method and apparatus for inspecting semiconductor devices. This apparatus includes a wafer stage, a stage driving unit, a charged-particle beam irradiation system, and various control units. It allows for the collection and analysis of secondary-electron intensity comparison data, which enhances the reliability of detecting faults in semiconductor wafers.
Another important patent is the defect inspection apparatus that employs a first main controller to produce reflectance distribution in a wafer surface. This innovation generates illumination light control data, which adjusts the intensity of the reflected light across the wafer surface, ensuring high accuracy in defect detection.
Career Highlights
Throughout his career, Masahiko Ikeno has worked with reputable companies, including Mitsubishi Electric Corporation and Maeda & Associates. His experiences in these organizations have undoubtedly shaped his approach to research and development in semiconductor technologies.
Collaborations
Ikeno has collaborated with several esteemed colleagues, including Hideo Saeki and Hiroshi Kawashima. These partnerships have contributed to the advancement of semiconductor inspection tools, allowing for innovations that improve the manufacturing quality and yield of semiconductor devices.
Conclusion
Masahiko Ikeno's work in semiconductor inspection technology is a testament to the impact of innovative thinking on the industry. With 11 patents to his name, his contributions continue to drive advancements that enhance the precision and efficiency of semiconductor manufacturing processes. As the field evolves, Ikeno's inventions will likely remain at the forefront of semiconductor technology advancements.