The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2003
Filed:
May. 08, 2000
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
An apparatus for inspecting a semiconductor device comprises a wafer stage ( ), a stage driving unit ( ), a charged-particle beam irradiation unit ( ), an electronic optical system ( ), a charged-particle beam control unit (12), a secondary-electron detection unit ( ), an amplifier ( ), a secondary-electron intensity comparison unit ( ), a database ( ) connected to an output of the secondary-electron intensity comparison unit ( ), a PC ( ) connected to an output of the database ( ) and a main control unit ( ) connected to the output of the database ( ) and an output of the PC ( ), whose output is connected to the stage driving unit ( ), the charged-particle beam irradiation unit ( ) and the charged-particle beam control unit ( ). The database ( ) stores inspection results and inspection addresses on m inspection regions ( ) with strong possibility of having opening failures of contact holes ( ) in each of a plurality of semiconductor wafers ( ).