Company Filing History:
Years Active: 2000-2003
Title: Kouetsu Sawai: Innovator in Semiconductor Device Inspection
Introduction
Kouetsu Sawai is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor device inspection, holding a total of 2 patents. His work focuses on improving the methods and apparatus used in the inspection of semiconductor devices.
Latest Patents
One of his latest patents is a method and apparatus for inspecting semiconductor devices. This innovative apparatus includes a wafer stage, a stage driving unit, a charged-particle beam irradiation unit, an electronic optical system, and a charged-particle beam control unit. The system is designed to detect potential failures in contact holes of semiconductor wafers by evaluating the secondary electrons emitted from interconnect lines. This technology facilitates the assessment of contact between adjacent conductor patterns, enhancing the reliability of semiconductor devices.
Career Highlights
Kouetsu Sawai is associated with Mitsubishi Denki Kabushiki Kaisha, a leading company in the electronics and semiconductor industry. His work has been instrumental in advancing inspection technologies that are critical for the production of high-quality semiconductor devices.
Collaborations
He has collaborated with notable coworkers, including Masahiko Ikeno and Toshiharu Katayama, contributing to various projects that aim to enhance semiconductor technology.
Conclusion
Kouetsu Sawai's innovative work in semiconductor device inspection showcases his expertise and commitment to advancing technology in this critical field. His contributions continue to impact the industry positively.